SC-SPL
Silicon Wafer PL Module
Overview
PL for raw silicon wafers. No contact needed.
Photoluminescence detects wafer defects without electrical contact. Compatible with mono/quasi-mono/multi.
Key Features
- ✓No contact
- ✓PL correlation
- ✓High sensitivity
- ✓All silicon types
- ✓Inline ready
- ✓980nm laser
Technical Specifications
| Size | 156-210mm |
| Crack | >=50um |
| Speed | 0.5-2s |
| Camera | 1K InGaAs |
| Source | 980nm |
| Weight | 20kg |