Microcrack Testing Module

Overview

6000+ pieces/hour microcrack detection.

High-speed automated microcrack detection. TFC/bright/dark field. 156-210mm compatible.

Key Features

  • ✓>=6000pcs/hr
  • ✓0.25-0.5s
  • ✓InGaAs/4K
  • ✓Multi-scheme
  • ✓156-210mm
  • ✓All cells

Technical Specifications

Crack>=50um
Speed0.25-2s
CameraInGaAs/4K
Source1100-1450nm
Weight20kg

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